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Fabrication of TiAl target by mechanical alloying and applications in physical vapour deposition coating

Abstract
The research involves the development of a powder metallurgical route for producing good quality TiAl targets for making physical vapour deposition (PVD) coatings. Mixtures of elemental titanium and aluminium powders were mechanically milled using a novel discus milling technique under various conditions. Hot isostatic pressing (HIP) was then employed for consolidation of the mechanically alloyed powders. A cathodic arc vapour deposition process was applied to produce a TiAIN coating. A microstructural examination was conducted on the target material and PVD coatings, using X-ray diffractometry (XRD), X-ray photoelectron spectrometry (XPS) and scanning electron microscopy (SEM). It has been found that combining mechanical alloying and HIP enable us to produce a fairly good quality of TiAl based target. The PVD coatings obtained from the TiAl target showed very high microhardness values.
Type
Journal Article
Type of thesis
Series
Citation
Gabbitas, B., Cao, P., Raynova, S. & Zhang, D. (2007). Fabrication of TiAl target by mechanical alloying and applications in physical vapour deposition coating. Materials Science Forum, 534-36(1), 805- 808.
Date
2007
Publisher
Trans Tech Publications Ltd
Degree
Supervisors
Rights